A metal-based microcavity array discharge enclosed by quartz dielectrics forms an in-plasma-catalyst reactor. These devices allow to integrate dielectric, catalytic surfaces as the cavity bottom. The plasma parameters as well as the distribution of the discharges inside and above the cavities are strongly dependent on external parameters such as cavity dimension, pressure and voltage. The project investigates the influence of the plasma conditions on the catalytic processes by observing the volume close to the catalyst following the gas flow. Especially the role of charged species is investigated by phase- and space-resolved diagnostics. Ex-situ measurements of the catalytic surfaces round off the experiments.
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